analysis astronomicalinstruments congresses crystaloptics designandconstruction electronbeam extremeultravioletlithography gammaraydetectors gammarays grenzrays imagingsystems industrialapplications instruments ionbeamlithography laser-plasmainteractions layerstructure(solids) lithography mirrors multilayered neutronoptics neutronsources opticaldetectors opticalproperties opticalradiometry radiationdosimetry radiationsources scientificsatellites semiconductornuclearcounters semiconductors solids superlatticesasmaterials surfaces(technology) thinfilms ultravioletastronomy ultravioletdetectors ultravioletradiation x-rayastronomy x-raymicroscopes x-rays x-rayspectroscopy x-raytelescopes xmmobservatory