actuators adaptive compositematerials continuummechanics crystaldefects crystals defects designandconstruction differentiabledynamicalsystems dynamicalsystemsandergodictheory electromechanicaldevices electronicpackaging engineeringmathematics fatigue finiteelementmethod fracturemechanics imagingsystems industrialapplications inhomogeneousmaterials lasers materials mathematicalmethodsinphysics mathematicalmodels mathematicalphysics mathematics mechanicalproperties mechanics microelectromechanicalsystems microelectronics micromachining microporosity microstructure miniatureelectronicequipment nanostructuredmaterials optics physics scalinglaws(statisticalphysics) scanningsystems solidmechanics solids statisticalmechanics stressconcentration surfaces(physics)