530 appliedoptics astrophysics atomic chemistry collisions(nuclearphysics) extraterrestrialphysics fastatombombardment hadrons heavyions ions lasermatterinteraction laserphysics lasertechnologyandphysics mass molecular nuclearengineering nuclearphysics opticalandplasmaphysics opticaldevices opticalspectroscopy optoelectronics particleandnuclearphysics photonics physicaloptics physics plasma(ionizedgases) plasmaphysics plasmaphysik qc770-798 spacesciences spectrometry spectrumanalysis sputtering(physics) surfaces(physics) surfacesandinterfaces thinfilms ultrafastoptics